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Keith Hanford
at Corning Tropel Corp
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 5 June 2018 Paper
Use of advanced sensitivity approach to novel optical compensation methods
Proceedings Volume 10690, 106900C (2018) https://doi.org/10.1117/12.2311325
KEYWORDS: Optical design, Optical components, Wavefronts, Tolerancing, Excel, Metals, Optics manufacturing
Proceedings Article | 14 May 2007 Paper
Comparison of two methods for optical performance compensation via moving lens elements
Proceedings Volume 10316, 1031618 (2007) https://doi.org/10.1117/12.719502
KEYWORDS: Optical components, Actuators, Chemical elements, Optics manufacturing, Sensors, Optomechanical design, Control systems design, Prototyping, Manufacturing, Optical design
Proceedings Article | 30 July 2002 Paper
157-nm system test for high-NA lithographic lens systems
Paul Tompkins, Robert Ligenza, Paul Dewa, Horst Schreiber, Lisa Rich, K. Hanford
Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474556
KEYWORDS: Wavefronts, Interferometers, Spatial coherence, Polarizers, Birefringence, Lithography, Polarization, Phase measurement, Oxygen, Interferometry
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