Prof. Keith R. Olson
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 30 June 2018
JATIS Vol. 4 Issue 03
KEYWORDS: Contamination, Gold, Semiconducting wafers, Vacuum ultraviolet, Mirrors, Silicon, Microscopes, Head-mounted displays, Temperature metrology, Thin films

Proceedings Article | 2 September 2008 Paper
Proc. SPIE. 7069, Optical System Contamination: Effects, Measurements, and Control 2008
KEYWORDS: Contamination, Polymers, Photons, Molecules, Lamps, Photopolymerization, Molecular interactions, Radiation effects, Space operations, Vacuum ultraviolet

Proceedings Article | 15 October 2004 Paper
Proc. SPIE. 5526, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control
KEYWORDS: Thin films, Contamination, Optical spheres, Cameras, Particles, Silicon, Light scattering, Silicon films, Bidirectional reflectance transmission function, Light

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