Mr. Keith C. Thompson
Graduate Research Assistant at Univ of Illinois
SPIE Involvement:
Author
Publications (11)

SPIE Journal Paper | May 1, 2009
OE Vol. 48 Issue 05
KEYWORDS: Gold, Molybdenum, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Mirrors, Ruthenium, Plasma, Photodiodes, Argon

SPIE Journal Paper | July 1, 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Gold, Reflectivity, Molybdenum, Ions, Extreme ultraviolet, Mirrors, Plasma, Xenon, Extreme ultraviolet lithography, Photodiodes

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Sensors, Calibration, Argon, Microchannel plates, Ions, Magnetism, Xenon, Extreme ultraviolet, Spherical lenses, Plasma

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Sensors, Particles, Microchannel plates, Ions, Xenon, Ionization, Extreme ultraviolet, Atmospheric particles, Plasma

PROCEEDINGS ARTICLE | January 18, 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Gold, Mirrors, Contamination, Sputter deposition, Ions, Silicon, Extreme ultraviolet lithography, Molybdenum, Ruthenium, Tin

PROCEEDINGS ARTICLE | January 18, 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Scattering, Ions, Photodiodes, Xenon, Extreme ultraviolet, Chlorine, Plasma, Light, Tin

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top