Keith C. Thompson
Graduate Research Assistant at Univ of Illinois
SPIE Involvement:
Author
Publications (11)

SPIE Journal Paper | 1 May 2009
OE Vol. 48 Issue 05
KEYWORDS: Gold, Molybdenum, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Mirrors, Ruthenium, Plasma, Photodiodes, Argon

SPIE Journal Paper | 1 July 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Gold, Reflectivity, Molybdenum, Ions, Extreme ultraviolet, Mirrors, Plasma, Xenon, Extreme ultraviolet lithography, Photodiodes

Proceedings Article | 21 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Ions, Extreme ultraviolet, Calibration, Argon, Plasma, Magnetism, Sensors, Microchannel plates, Spherical lenses, Xenon

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Xenon, Ions, Particles, Plasma, Sensors, Microchannel plates, Ionization, Extreme ultraviolet, Atmospheric particles, Mirrors

Proceedings Article | 18 January 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Contamination, Tin, Ruthenium, Mirrors, Extreme ultraviolet lithography, Gold, Molybdenum, Sputter deposition, Silicon, Ions

Showing 5 of 11 publications
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