Keizo Yamada
at Holon Co Ltd
SPIE Involvement:
Publications (6)

Proceedings Article | 14 October 2011 Paper
Keizo Yamada, Yasunobu Kitayama, Peter Fiekowsky
Proceedings Volume 8166, 81662W (2011)
KEYWORDS: Inspection, Photomasks, Extreme ultraviolet, Deep ultraviolet, Electron beams, Sensors, Holons, Defect detection, Extreme ultraviolet lithography, Computer aided design

Proceedings Article | 17 October 2008 Paper
Tung-Yaw Kang, Hsin-Chang Lee, H. Zhang, K. Yamada, Y. Kitayama, K. Kobayashi, Peter Fiekowsky
Proceedings Volume 7122, 71221F (2008)
KEYWORDS: Inspection, Photomasks, Scanning electron microscopy, Computer aided design, Semiconducting wafers, Printing, Defect detection, Defect inspection, Holons, Lithography

Proceedings Article | 6 April 2007 Paper
Yeong-Uk Ko, Keizo Yamada, Takeo Ushiki
Proceedings Volume 6518, 65182T (2007)
KEYWORDS: Capacitance, Resistance, Signal processing, Signal analyzers, Semiconductors, Inspection, Signal detection, Manufacturing, Sensors, Measurement devices

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 615230 (2006)
KEYWORDS: Electrons, Interfaces, Monte Carlo methods, Dielectrics, Thin films, Image processing, Oxides, Device simulation, Semiconductors, Scattering

Proceedings Article | 15 July 2003 Paper
Keizo Yamada, Takeo Ushiki, Yousuke Itagaki, Robert Newcomb
Proceedings Volume 5041, (2003)
KEYWORDS: Semiconducting wafers, Process control, Silicon, Silica, Electron beams, Yield improvement, Etching, Scanning electron microscopy, Semiconductors, Manufacturing

Showing 5 of 6 publications
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