Kelvin Yih-Yuh Doong
Section Mananger at Taiwan Semiconductor Mfg Co
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Scanning electron microscopy, Photomasks, Cadmium sulfide, Critical dimension metrology, Semiconducting wafers, Plasma

Proceedings Article | 10 July 2003
Proc. SPIE. 5042, Design and Process Integration for Microelectronic Manufacturing
KEYWORDS: Diffractive optical elements, Ions, Field effect transistors, Connectors, Resistors, Structural design, Analog electronics, Product engineering, Electronic design automation, Standards development

Proceedings Article | 12 July 2002
Proc. SPIE. 4692, Design, Process Integration, and Characterization for Microelectronics
KEYWORDS: Logic, Defect detection, Metals, Resistance, Inspection, Structural design, Semiconducting wafers, Failure analysis, Prototyping, Electrical breakdown

Proceedings Article | 23 April 2001
Proc. SPIE. 4406, In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II
KEYWORDS: Oxides, Logic, Etching, Photomasks, Ion implantation, Field effect transistors, Chlorine, Failure analysis, Thermal oxidation, Oxidation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top