Kenneth C. Johnson
Proprietor at KJ Innovation
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 4 October 2019
JM3 Vol. 18 Issue 04

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Carbon dioxide lasers, Optical design, Monochromators, Diffraction gratings, Reflectors, Optical simulations, Reflectivity

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