Ken E. Stumpe
at Mahr
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 17 August 1999
Proc. SPIE. 3745, Interferometry '99: Applications

Proceedings Article | 29 March 1999
Proc. SPIE. 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
KEYWORDS: Mirrors, Beam splitters, Phase shifting, Metrology, Interferometers, Sensors, Data acquisition, Zernike polynomials, Shape analysis, Aluminum

Proceedings Article | 29 March 1999
Proc. SPIE. 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
KEYWORDS: Photovoltaics, Metrology, Imaging systems, Interferometers, Silicon, Semiconductor lasers, Laser metrology, Semiconducting wafers, Wafer testing, Fizeau interferometers

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