Dr. Kenichi Hibino
Information Resources Office at National Institute of Advanced Industrial Science and Technology
SPIE Involvement:
Author
Publications (24)

SPIE Journal Paper | March 2, 2017
OE Vol. 56 Issue 03
KEYWORDS: Phase measurement, Light scattering, Spherical lenses, Fizeau interferometers, Phase shifts, Reflection, Monochromatic aberrations, Double positive medium, Sensors, Collimators

PROCEEDINGS ARTICLE | August 28, 2016
Proc. SPIE. 9960, Interferometry XVIII
KEYWORDS: Confocal microscopy, Monochromatic aberrations, Beam splitters, Reflection, Denoising, Collimators, Phase measurement, Spherical lenses, Phase shifts, Fizeau interferometers

PROCEEDINGS ARTICLE | August 18, 2014
Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis
KEYWORDS: Semiconductors, Lithography, Detection and tracking algorithms, Reflectivity, Fourier transforms, Wavelength tuning, Photomasks, Algorithm development, Phase shifts, Fizeau interferometers

PROCEEDINGS ARTICLE | May 1, 2014
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Wafer-level optics, Polishing, Lithium niobate, Detection and tracking algorithms, Crystals, Wavelength tuning, Semiconducting wafers, Surface finishing, Phase shifts, Fizeau interferometers

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Semiconductors, Quadrature amplitude modulation, Glasses, Phase interferometry, Precision measurement, Photomasks, Extreme ultraviolet, Algorithm development, Americium, Phase shifts

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Semiconductors, Refractive index, Beam splitters, Glasses, Interferometry, Optical testing, Wavelength tuning, Photomasks, Phase shifts, Fizeau interferometers

Showing 5 of 24 publications
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