Dr. Kenichi Hibino
Information Resources Office at National Institute of Advanced Industrial Science and Technology
SPIE Involvement:
Author
Publications (26)

PROCEEDINGS ARTICLE | September 14, 2018
Proc. SPIE. 10742, Optical Manufacturing and Testing XII
KEYWORDS: Monochromatic aberrations, Mirrors, Optical spheres, Interferometers, Calibration, Error analysis, Optical testing, 3D metrology, Aspheric lenses, Spherical lenses

PROCEEDINGS ARTICLE | August 18, 2018
Proc. SPIE. 10749, Interferometry XIX
KEYWORDS: Ferroelectric materials, Phase modulation, Glasses, Phase shift keying, Phase interferometry, Phase measurement, Spherical lenses, Phase shifts, Fizeau interferometers

SPIE Journal Paper | March 2, 2017
OE Vol. 56 Issue 03
KEYWORDS: Phase measurement, Light scattering, Spherical lenses, Fizeau interferometers, Phase shifts, Reflection, Monochromatic aberrations, Double positive medium, Sensors, Collimators

PROCEEDINGS ARTICLE | August 28, 2016
Proc. SPIE. 9960, Interferometry XVIII
KEYWORDS: Confocal microscopy, Monochromatic aberrations, Beam splitters, Reflection, Denoising, Collimators, Phase measurement, Spherical lenses, Phase shifts, Fizeau interferometers

PROCEEDINGS ARTICLE | August 18, 2014
Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis
KEYWORDS: Semiconductors, Lithography, Detection and tracking algorithms, Reflectivity, Fourier transforms, Wavelength tuning, Photomasks, Algorithm development, Phase shifts, Fizeau interferometers

PROCEEDINGS ARTICLE | May 1, 2014
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Wafer-level optics, Polishing, Lithium niobate, Detection and tracking algorithms, Crystals, Wavelength tuning, Semiconducting wafers, Surface finishing, Phase shifts, Fizeau interferometers

Showing 5 of 26 publications
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