Dr. Kenji Honda
Technical Director at Toshiba Corp
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 13 March 2015
Proc. SPIE. 9403, Image Sensors and Imaging Systems 2015
KEYWORDS: Sensors, Silicon, Metals, CMOS sensors, Optical filters, Signal to noise ratio, Ion implantation, Signal processing, Quantum efficiency, Signal detection

Proceedings Article | 3 May 2004
Proc. SPIE. 5379, Design and Process Integration for Microelectronic Manufacturing II
KEYWORDS: Metals, Optical proximity correction, Back end of line, Diffractive optical elements, Photomasks, Logic, Resistance, Structural design, Scanning electron microscopy, Very large scale integration

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Polymers, Silicon, Lithography, Photoresist materials, Polymerization, Semiconducting wafers, Chemically amplified resists, Spectroscopy, Ultraviolet radiation, Information operations

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Polymers, Lithography, Absorbance, Etching, Carbonates, Resistance, Plasma, Transparency, Systems modeling, Photoresist materials

Proceedings Article | 24 August 2001
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Polymers, Line edge roughness, Lithography, Carbonates, Photoresist materials, Deep ultraviolet, Photomasks, Image processing, Chemistry, Binary data

Showing 5 of 12 publications
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