Dr. Kenji Iso
at Mitsubishi Chemical Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 February 2020 Presentation + Paper
Proc. SPIE. 11280, Gallium Nitride Materials and Devices XV
KEYWORDS: Gallium nitride, Crystals, Vapor phase epitaxy, Luminescence, Scanning electron microscopy, Silicon, Oxygen, Gallium, Interfaces, Semiconducting wafers

Proceedings Article | 16 February 2020 Paper
Proc. SPIE. 11280, Gallium Nitride Materials and Devices XV
KEYWORDS: Gallium nitride, Crystals, Etching, Transmission electron microscopy, Semiconducting wafers, Polishing, X-rays, Electronic components

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