Dr. Kenji Mochida
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 March 2015 Paper
Kazunori Sakai, Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuhiro Yoshikawa, Naoki Man, Hirofumi Seiki, Masaaki Takeda
Proceedings Volume 9425, 942522 (2015) https://doi.org/10.1117/12.2085717
KEYWORDS: Oxygen, Fluorine, Etching, Process control, Distortion, Photoresist materials, Hydrogen, Thin films, Carbon, Profiling

Proceedings Article | 27 March 2014 Paper
Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuki Kawai, Yoshihiko Taguchi, Naoki Man, Hideki Hashimoto
Proceedings Volume 9051, 90511Q (2014) https://doi.org/10.1117/12.2045864
KEYWORDS: Photoresist materials, Line width roughness, Polymers, Lithography, Chemical analysis, Semiconducting wafers, Photoresist processing, Optical lithography, Lithographic illumination, Immersion lithography

Proceedings Article | 29 March 2013 Paper
Shinichi Nakamura, Kenji Mochida, Tooru Kimura, Kana Nakanishi, Naohiko Kawasaki, Naoki Man
Proceedings Volume 8682, 86821H (2013) https://doi.org/10.1117/12.2011394
KEYWORDS: Photoresist materials, Diffusion, Line width roughness, Lithography, Coating, Ions, Photoresist processing, Chemical analysis, Polymers, Transmission electron microscopy

Proceedings Article | 27 August 2009 Paper
Masaki Shimizu, Kenji Mochida, Youhei Takeda, Yuiga Asai, Tamejiro Hiyama
Proceedings Volume 7415, 74151G (2009) https://doi.org/10.1117/12.825442
KEYWORDS: Silicon, Solid state electronics, Luminescence, Quantum efficiency, Solids, Solid state lasers, Solid state physics, Bromine, Chromophores, Crystals

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