Prof. Kenjiro T. Miura Profile

Prof. Kenjiro T. Miura

at Shizuoka Univ

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Publications (4)

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Proceedings Article | 3 September 2019 Paper

Measurement of patterned surfaces with non-fluorescent structured illumination microscope

S. Usuki, G. Shibata, Kenjiro Miura

Proceedings Volume 11102, 111021L (2019) https://doi.org/10.1117/12.2529023

KEYWORDS: Microscopy, Image processing, Microscopes, Imaging systems, Diffraction, Image resolution, Speckle, Light sources, Michelson interferometers, Optical microscopes

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Patterned surfaces which include semiconductor devices, optical components and other functional surfaces play important role in recent manufacturing. Optical measurements with non-destructive property is available for them but further improvement in spatial resolution and throughput are necessary. In this study, structured illumination microscopy was employed for high-resolution wide-field measurement. Structured illumination microscopy has been usually applied for fluorescent bio-imaging. For non-fluorescent imaging and industrial applications, one problem is speckle noise in structured illumination generation and another problem is vibration and thermal drift in high-precision positioning of laser-interference standing-wave illumination. In our development, the phase of the structured illumination is detected as a fringe signal with another interferometric measurement system, which is employed by structured illumination microscopy as originally developed; it uses a low-coherence light source for high-resolution and low-speckle imaging. We constructed an optical system consisting of plural Michelson interferometers, which allow the low-coherence interference fringes to be manipulated on a sample and the phase to be detected on another sensor. Feeding back the phase of structured illumination through super-resolution processing allows robust imaging despite vibrations, drifting, and environmental changes. A series of experiments were performed to verify our developed microscope system applied for measurement of patterned surfaces.

Proceedings Article | 18 August 2018 Paper

Object scanning scheme in wide-field low-coherence interferometry

S. Usuki, Kenjiro Miura

Proceedings Volume 10749, 1074917 (2018) https://doi.org/10.1117/12.2320381

KEYWORDS: Interferometry, Objectives, Interferometers, Light sources, Mirrors, Optical microscopy, 3D image processing, Microscopes, Imaging systems, Light emitting diodes

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The low-coherence interferometry which is usually combined with the wide-field optical microscopy is well known technique for surface profile measurement, micro step measurement and so on. One of the problems is that its axial measurement range is typically limited by its depths of field of imaging, which is determined by the numerical aperture of their objective lens and the central wavelengths of their light source. If a low-coherence interference fringe is far outside the depth of field, the measurement accuracy inevitably decreases, regardless of how well adjusted the reference mirror is. To solve this problem and improve the axial measurement range of the low-coherence interferometry in this study, an object scanning measurement scheme involving a Linnik interferometer was developed. To calibrate the system in the proposed technique, image post-processing is performed for a well-conditioned state to ensure that a lowcoherence interference fringe is generated within the depth-of-field, so that three-dimensional objects with high-aspectratio structures can be scanned along the axial direction. During object scanning, this state is always monitored and corrected by adjusting the reference mirror. By using this scheme, the axial measurement range can be significantly improved up to the working distance of the objective lens without compromising the measurement accuracy. The working distance is typically longer than 10 mm, while the depth-of-field of the microscope is generally around 0.01 mm, although it varies depending on the imaging system. In this report, the experimental setup of an object scanning low-coherence interferometry is presented, a series of experimental verifications is described, and the results are discussed.

Proceedings Article | 19 September 2017 Presentation + Paper

Forming intermediate spatial resolution of microscopy images for continuous zooming on multi-resolution processing system

Evan H. Putranto, Tomohiro Suzuki, Shin Usuki, Kenjiro T. Miura

Proceedings Volume 10396, 1039615 (2017) https://doi.org/10.1117/12.2273559

KEYWORDS: Microscopes, Microscopy, Scanning electron microscopy, Image processing, Spatial resolution, Zoom lenses, Optical microscopes, Electron microscopes, Image registration, Objectives

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Digital zooming especially on microscopy image has attempted to improve their quality of measurement into a better assessment. However, since the field of view of high-resolution image are not wide despite of the fact that high-resolution image has more information detail and low-resolution image has their merits which is bring a big picture of the whole structure, we need to observe the sample in any scale. This problem was been solved by developing dual-view of high and low images resolution1 but in a single interpolated images. The goal of this research is utilize multi-resolution images to develop smooth zooming magnification of microscopy image. In order to achieve smooth zooming magnification on different condition of the images, scheme process will be needed. First, we took a several spatial images of the same sample based on the different objective lens, author was used 4 objective lens which are 10×, 20×, 50× and 150× magnification. In this synthesize phase, we interpolate lower resolution image for synthesize purpose with the next higher resolution image of the sample. Second, continue to looking for the feature point of both images with SIFT feature point method until we synthesize both images. Third, author treat this synthesized image with discrete fourier transform (DFT) with low-pass filter as the same size with numerical aperture (NA) that was input on the first phase. Then the fourth phase is looping this processes until intermediate images are generated enough to be blend with pyramid blend method. In this article we also try to make a system that can arbitrarily generate intermediate image with hierarchical system.

Proceedings Article | 19 September 2017 Paper

Improving spatial resolution of the light field microscope with Fourier ptychography

Yoshitake Tani, Shin Usuki, Kenjiro Miura

Proceedings Volume 10410, 1041009 (2017) https://doi.org/10.1117/12.2273665

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Light field microscope (LFM) is an optical microscope capable of obtaining images having large depth of field with different viewpoints. By using the parallax of these multi-view images, it is possible to reconstruct the 3D sample. However, the sampling interval of this multi-viewpoint image depends on the pitch interval of the microlens array, so the spatial resolution is low, and the accuracy of the 3D sample to be reconstructed is also low. Conventional research has a method of increasing the spatial resolution by subpixel-shifted multiple images. However, this method has problems such as the necessity of mechanical operation and high cost. Therefore, we propose applying Fourier ptychography to the LFM. Fourier ptychography is a technique to obtain high spatial resolution images by joining images obtained by irradiating samples from different angles using LED arrays in Fourier space. Fourier ptychography does not require mechanical scanning and is high throughput and low cost. In addition, Fourier ptycoography is possible to obtain phase information on a sample, and it is also possible to obtain a fine 3D sample. We propose a method to generate high spatial resolution multiview images using Fourier ptychography and reconstruct highly accurate 3D sample from those images. In this research, we experiment with the original LFM and verify the effect.

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