Dr. Kenneth L. Bell
Sales Director
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 June 1992
Proc. SPIE. 1672, Advances in Resist Technology and Processing IX
KEYWORDS: Lithography, Statistical analysis, Data modeling, Scanning electron microscopy, Photoresist materials, Solids, Optimization (mathematics), Photoresist processing, Thermal modeling, Photoresist developing

Proceedings Article | 1 July 1991
Proc. SPIE. 1463, Optical/Laser Microlithography IV
KEYWORDS: Wafer-level optics, Oxides, Optical lithography, Statistical analysis, Silicon, Reflectivity, Electroluminescence, Critical dimension metrology, Semiconducting wafers, Temperature metrology

Proceedings Article | 1 June 1990
Proc. SPIE. 1262, Advances in Resist Technology and Processing VII
KEYWORDS: Mathematical modeling, Metals, Ions, Chemistry, Photoresist materials, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Photoresist developing, Standards development

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