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Prof. Kenneth R. Carter
Professor at Univ of Massachusetts Amherst
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 6 May 2005 Paper
Perfluoropolyethers as novel materials for soft lithography
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598849
KEYWORDS: Lithography, Liquids, Silicon, Atomic force microscopy, Semiconducting wafers, Chemistry, Natural surfaces, Ultraviolet radiation, Toxicity, Microfluidics
Conference Committee Involvement (5)
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Alternative Lithographic Technologies VI
24 February 2014 | San Jose, California, United States
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