Dr. Kenneth D. Duerksen
Retired at Tokyo Electron America Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 May 2006 Paper
Andrew Jamieson, Thuc Dam, Ki-Ho Baik, Ken Duerksen, Elie Eidson, Keiji Akai, Kazuya Hisano, Norifumi Kohama, Shinichi Machidori
Proceedings Volume 6283, 62831P (2006) https://doi.org/10.1117/12.681751
KEYWORDS: Photomasks, Coating, Manufacturing, Photoresist processing, Semiconducting wafers, Head, Ultraviolet radiation, Particles, Thin film coatings, Wafer manufacturing

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