Dr. Kenneth M. Fahy
Postgraduate Student at NewLambda Technologies
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | August 27, 2010
Proc. SPIE. 7802, Advances in X-Ray/EUV Optics and Components V
KEYWORDS: Zemax, Mirrors, Metals, X-rays, Coating, Extreme ultraviolet, EUV optics, Plasma, Liquids, Tin

PROCEEDINGS ARTICLE | June 3, 2005
Proc. SPIE. 5826, Opto-Ireland 2005: Optical Sensing and Spectroscopy
KEYWORDS: Electron beams, Spectroscopy, Ions, Laser development, Xenon, Ionization, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

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