Prof. Kenneth Emmanuel Gonsalves
Visiting Professor
SPIE Involvement:
Publications (28)

SPIE Journal Paper | 27 December 2022
Manvendra Chauhan, Kumar Palit, Sumit Choudhary, Satinder Sharma, Kenneth Gonsalves
JM3, Vol. 21, Issue 04, 044603, (December 2022)
KEYWORDS: Extreme ultraviolet lithography, Electron beam lithography, Extreme ultraviolet, Silicon, Etching, Optical lithography, Thin films, Line edge roughness, Deep ultraviolet, Logic

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11612, 1161208 (2021)

Proceedings Article | 26 March 2020 Presentation + Paper
Proceedings Volume 11326, 1132604 (2020)
KEYWORDS: Electron beam lithography, Nickel, Metals, Etching, Line edge roughness, Line width roughness, Silicon, Helium, Resistance, Thin films

Proceedings Article | 23 March 2020 Paper
Satinder Sharma, Mohamad Moinuddin, Midathala Yogesh, Shivani Sharma, Manoj Sahani, Subrata Ghosh, Kenneth Gonsalves
Proceedings Volume 11326, 113261C (2020)
KEYWORDS: Nanoparticles, Electron beam lithography, Silver, Line edge roughness, Helium, Photomultipliers, Extreme ultraviolet, Lithography, Absorbance, Ions

Proceedings Article | 19 March 2018 Paper
Satinder Sharma, Mohamad Ghulam Moinuddin, Pulikanti Guruprasad Reddy, Chullikkattil Pradeep, Subrata Ghosh, Kenneth Gonsalves
Proceedings Volume 10583, 105831Q (2018)
KEYWORDS: Electron beam lithography, Extreme ultraviolet lithography, Thin films, Lithography, Line edge roughness, Line width roughness, Tin, Resolution enhancement technologies, Photoresist developing, Atomic force microscopy

Showing 5 of 28 publications
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