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Kenneth Hernandez
at DuPont Electronics & Industrial
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Author
Publications (2)
Proceedings Article | 9 April 2024 Paper
Disruptive non-fluorinated photoacid generators using computational chemistry and library design
P. LaBeaume, K. Hernandez, E. Vitaku, T. Marangoni, E. Aqad, M. Li, C. Hoelzel, J. Lachowski, M. Hayes, S. Wong, J. Li, A. Kwok, W. Huang, J. Park, H. He, H. Mackay, C. Liu, J. Cameron, C. Xu, Q. Xie, K. Petrillo
Proceedings Volume 12957, 129572B (2024) https://doi.org/10.1117/12.3025297
KEYWORDS: Photoacid generators, Photoresist materials, Semiconducting wafers, Design, Lithography, Optical lithography, Coating thickness, Chemistry, Coating, Silicon, Sustainability, Extreme ultraviolet lithography
Proceedings Article | 1 May 2023 Poster + Paper
Considerations in the design of photoacid generators
Conner Hoelzel, Li Cui, Benjamin Naab, Jong Park, Philjae Kang, Kenneth Hernandez, Suzanne Coley, Stefan Alexandrescu, Rochelle Rena, James Cameron, Emad Aqad
Proceedings Volume 12498, 124981V (2023) https://doi.org/10.1117/12.2658981
KEYWORDS: Photoacid generators, Extreme ultraviolet lithography, Electrons, Extreme ultraviolet, Polymers, Design and modelling, Lithography, Materials properties, Line width roughness, Semiconducting wafers
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