Dr. Kenneth G. Kreider
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 29, 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Thin films, Lithography, Data modeling, Sensors, Silicon, Resistance, Platinum, Semiconducting wafers, Wafer testing, Temperature metrology

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