Mr. Kenneth T. Luey
Senior Scientist at The Aerospace Corporation
SPIE Involvement:
Author
Publications (14)

SPIE Journal Paper | January 4, 2018
OE Vol. 57 Issue 01
KEYWORDS: Vacuum ultraviolet, Semiconducting wafers, Contamination, Silicon, Lamps, Liquids, Scattering, Epoxies, Optical engineering, Wafer-level optics

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8492, Optical System Contamination: Effects, Measurements, and Control 2012
KEYWORDS: Oxides, Silicon, Lamps, Ultrasonics, Silicon films, Astronomical imaging, Analog electronics, Vacuum ultraviolet, Adhesives, Natural surfaces

PROCEEDINGS ARTICLE | September 8, 2010
Proc. SPIE. 7794, Optical System Contamination: Effects, Measurements, and Control 2010
KEYWORDS: Gold, Contamination, Aerospace engineering, Scattering, Molecules, Silicon, Silicon films, Silicon carbide, Vacuum ultraviolet, Semiconducting wafers

PROCEEDINGS ARTICLE | September 8, 2010
Proc. SPIE. 7794, Optical System Contamination: Effects, Measurements, and Control 2010
KEYWORDS: Carbon dioxide, Fluctuations and noise, Data modeling, Aerosols, Particles, Space telescopes, Turbulence, Atmospheric particles, Atmospheric modeling, Device simulation

PROCEEDINGS ARTICLE | September 2, 2008
Proc. SPIE. 7069, Optical System Contamination: Effects, Measurements, and Control 2008
KEYWORDS: Microscopes, Contamination, Molecules, Silicon, Raman spectroscopy, Polymerization, Space operations, Vacuum ultraviolet, Photomicroscopy, Semiconducting wafers

PROCEEDINGS ARTICLE | September 2, 2008
Proc. SPIE. 7069, Optical System Contamination: Effects, Measurements, and Control 2008
KEYWORDS: Mathematical modeling, Carbon dioxide, Data modeling, Aerosols, Particles, Space telescopes, Turbulence, Convection, Atmospheric particles, Device simulation

Showing 5 of 14 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top