Kenneth T. Luey
Senior Scientist (Retired) at KTL
SPIE Involvement:
Author
Publications (15)

SPIE Journal Paper | 30 June 2018
JATIS Vol. 4 Issue 03
KEYWORDS: Contamination, Gold, Semiconducting wafers, Vacuum ultraviolet, Mirrors, Silicon, Microscopes, Head-mounted displays, Temperature metrology, Thin films

SPIE Journal Paper | 4 January 2018
OE Vol. 57 Issue 01
KEYWORDS: Vacuum ultraviolet, Semiconducting wafers, Contamination, Silicon, Lamps, Liquids, Scattering, Epoxies, Optical engineering, Wafer-level optics

Proceedings Article | 15 October 2012 Paper
Proc. SPIE. 8492, Optical System Contamination: Effects, Measurements, and Control 2012
KEYWORDS: Oxides, Silicon, Lamps, Ultrasonics, Silicon films, Astronomical imaging, Analog electronics, Vacuum ultraviolet, Adhesives, Natural surfaces

Proceedings Article | 8 September 2010 Paper
Proc. SPIE. 7794, Optical System Contamination: Effects, Measurements, and Control 2010
KEYWORDS: Gold, Contamination, Aerospace engineering, Scattering, Molecules, Silicon, Silicon films, Silicon carbide, Vacuum ultraviolet, Semiconducting wafers

Proceedings Article | 8 September 2010 Paper
Proc. SPIE. 7794, Optical System Contamination: Effects, Measurements, and Control 2010
KEYWORDS: Carbon dioxide, Fluctuations and noise, Data modeling, Aerosols, Particles, Space telescopes, Turbulence, Atmospheric particles, Atmospheric modeling, Device simulation

Showing 5 of 15 publications
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