Dr. Kenneth C. Racette
Advisory Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Publications (26)

Proceedings Article | 11 May 2009 Paper
Takashi Mizoguchi, Satoshi Akutagawa, Monica Barrett, Michael Caterer, Robert Nolan, Kenneth Racette, Dennis Plouffe, Nancy Zhou
Proceedings Volume 7379, 73791R (2009) https://doi.org/10.1117/12.824303
KEYWORDS: Pellicles, Photomasks, Distortion, Quartz, Adhesives, Chromium, Current controlled current source, Lithium, Phase shifts

Proceedings Article | 11 May 2009 Paper
Nancy Zhou, Ken Racette, David Hasselbeck, Monica Barrett, Robert Nolan, Michael Caterer, Takashi Mizoguchi, Satoshi Akutagawa, Glenn Dickey, Toru Shirasaki
Proceedings Volume 7379, 737909 (2009) https://doi.org/10.1117/12.824250
KEYWORDS: Pellicles, Adhesives, Aluminum, Photomasks, Polymers, Distortion, Manufacturing, Optical lithography, Switching, Cobalt

Proceedings Article | 17 October 2008 Paper
N. Zhou, K. Racette, M. Hibbs, T. Mizoguchi, D. Hasselbeck, M. Barrett, R. Nolan, F. Houle, J. Ritter, A. Wagner, M. Caterer
Proceedings Volume 7122, 71220B (2008) https://doi.org/10.1117/12.801663
KEYWORDS: Pellicles, Photomasks, Adhesives, Data modeling, Inspection, Distortion, Transmittance, Immersion lithography, Lenses, Fermium

Proceedings Article | 17 October 2008 Paper
Proceedings Volume 7122, 712209 (2008) https://doi.org/10.1117/12.801950
KEYWORDS: Photomasks, Binary data, Opacity, Chromium, Etching, Photoresist processing, Critical dimension metrology, Quartz, Phase shifts, Mask making

Proceedings Article | 30 October 2007 Paper
Thomas Faure, Emily Gallagher, Louis Kindt, Steven Nash, Ken Racette, Richard Wistrom, Toru Komizo, Yasutaka Kikuchi, Satoru Nemoto, Yushin Sasaki, Atsushi Kominato, Toshiyuki Suzuki
Proceedings Volume 6730, 67300C (2007) https://doi.org/10.1117/12.748664
KEYWORDS: Photomasks, Etching, Distortion, Manufacturing, Line edge roughness, Photoresist processing, Dry etching, Image processing, Transmittance, Opacity

Showing 5 of 26 publications
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