Dr. Kenneth C. Racette
Advisory Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 11 May 2009 Paper
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Optical lithography, Switching, Polymers, Manufacturing, Distortion, Cobalt, Pellicles, Photomasks, Aluminum, Adhesives

Proceedings Article | 11 May 2009 Paper
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Lithium, Quartz, Chromium, Distortion, Pellicles, Photomasks, Adhesives, Phase shifts, Current controlled current source

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Opacity, Etching, Quartz, Chromium, Photomasks, Mask making, Critical dimension metrology, Photoresist processing, Binary data, Phase shifts

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Data modeling, Lenses, Inspection, Distortion, Pellicles, Transmittance, Photomasks, Fermium, Immersion lithography, Adhesives

Proceedings Article | 30 October 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Opacity, Etching, Dry etching, Image processing, Manufacturing, Distortion, Transmittance, Photomasks, Line edge roughness, Photoresist processing

Showing 5 of 26 publications
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