Kenneth J. Radigan
Technology Director at LR Consulting
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | June 1, 1992
Proc. SPIE. 1673, Integrated Circuit Metrology, Inspection, and Process Control VI
KEYWORDS: Microscopes, Diffraction, Metrology, Phase contrast, Visualization, Metals, Dielectrics, Inspection, Process control, Integrated circuits

PROCEEDINGS ARTICLE | June 1, 1992
Proc. SPIE. 1672, Advances in Resist Technology and Processing IX
KEYWORDS: Etching, Metals, Nickel, Plasmas, Oxygen, Photoresist materials, Reactive ion etching, Photoresist processing, Semiconducting wafers, Photoresist developing

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