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Kenneth M. Sautter
Senior Process Engineer at Yield Engineering Systems Inc
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Publications (1)
Proceedings Article | 1 June 1992 Paper
Develop end-point detection: a manufacturer's perspective
A. Reid, Kenneth Sautter
Proceedings Volume 1673, (1992) https://doi.org/10.1117/12.59799
KEYWORDS: Image processing, Signal processing, Semiconducting wafers, Process control, Photoresist developing, Integrated circuits, Metrology, Inspection, Manufacturing, Reflectivity
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