Dr. Keren J. Kanarik Profile

Dr. Keren J. Kanarik

Sr. Technical Director at Lam Research Corp

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Publications (2)

Proceedings Article | 21 March 2017 Paper

Plasma-assisted thermal atomic layer etching of Al2O3

Andreas Fischer, Richard Janek, John Boniface, Thorsten Lill, K. Kanarik, Yang Pan, Vahid Vahedi, Richard Gottscho

Proceedings Volume 10149, 101490H (2017) https://doi.org/10.1117/12.2258129

KEYWORDS: Ellipsometry, Etching, Focus stacking software, Plasma, Tin, Hydrogen, Aluminum, Fluorine, Plasma treatment, Semiconducting wafers

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Proceedings Article | 17 March 2015 Paper

Patterning in the era of atomic scale fidelity

Thorsten Lill, Samantha Tan, Keren Kanarik, Yoshie Kimura, Gowri Kamarthy, Meihua Shen, Vahid Vahedi, Jeffrey Marks, Richard Gottscho

Proceedings Volume 9428, 942809 (2015) https://doi.org/10.1117/12.2178326

KEYWORDS: Etching, Silicon, Optical lithography, Semiconducting wafers, Focus stacking software, Critical dimension metrology, Oxides, Reactive ion etching, Ions, Plasma

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