Dr. Kestutis Grigoras
Senior Scientist at VTT Technical Research Ctr of Finland Ltd
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | May 30, 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Bolometers, Silicon, Long wavelength infrared, Thermoelectric materials, Sensors, Infrared bolometers, Infrared imaging, Thermography, Infrared radiation, Microopto electromechanical systems, Infrared detection, Imaging systems, Photodetectors, Infrared sensors

PROCEEDINGS ARTICLE | May 30, 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Electrochemical etching, Coating, Picosecond phenomena, Scanning electron microscopy, Resistance, Fabrication, Silicon, Electrodes, Capacitance, Atomic layer deposition, Capacitors

PROCEEDINGS ARTICLE | October 25, 2012
Proc. SPIE. 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
KEYWORDS: Glasses, Silicon, Semiconducting wafers, Oxides, Microfluidics, Photoresist materials, Photomasks, Nondestructive evaluation, 3D metrology, Imaging devices

PROCEEDINGS ARTICLE | February 15, 2012
Proc. SPIE. 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
KEYWORDS: Bridges, Light emitting diodes, Light sources, Microelectromechanical systems, 3D metrology, Optical testing, Visible radiation, Silicon, Optical interferometry, Lamps

PROCEEDINGS ARTICLE | May 27, 2011
Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII
KEYWORDS: Light sources, Light emitting diodes, Light, Microelectromechanical systems, Halogens, Optical testing, Interferometry, Fluorescent materials, Lamps, Silicon

PROCEEDINGS ARTICLE | February 26, 2011
Proc. SPIE. 7928, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
KEYWORDS: Light sources, Light emitting diodes, Cameras, Silicon, Optical testing, Light, Infrared cameras, Optical interferometry, Ocean optics, Infrared radiation

Showing 5 of 10 publications
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