Dr. Kevin E. Cooper
Dean, Advanced Technology at Indian River State College
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Optical alignment, Semiconducting wafers, Chemical mechanical planarization, Copper, Scanning probe microscopy, Front end of line, Back end of line, Overlay metrology, Metals, Silicon

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