Kevin Herlihy
at Univ of North Carolina at Chapel Hill
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Oxides, Lithography, Iron, Nanoparticles, Ultraviolet radiation, Particles, Composites, Transmission electron microscopy, Adhesives, Liquids

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Fabrication, Lithography, Polymers, Glasses, Particles, Silicon, Scanning electron microscopy, Fluorine, Nanolithography, Liquids

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