Kevin L. Lin
at Univ of Illinois
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7204, Micromachining and Microfabrication Process Technology XIV
KEYWORDS: Thin films, Optical lithography, Sensors, Polymers, Metals, Scanning electron microscopy, Finite element methods, Aluminum, Excimer lasers, Computer aided design

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