Kevin J. Moeggenborg
Senior Scientist at Cabot Microelectronics Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 29 August 2008
Proc. SPIE. 7060, Current Developments in Lens Design and Optical Engineering IX
KEYWORDS: Mirrors, Diamond, Single point diamond turning, Polishing, Light scattering, Surface roughness, Bidirectional reflectance transmission function, Aluminum, Surface finishing, Chemical mechanical planarization

Proceedings Article | 31 August 2006
Proc. SPIE. 6288, Current Developments in Lens Design and Optical Engineering VII
KEYWORDS: Mirrors, Diamond turning, Polishing, Metals, Coating, Reflectivity, Aluminum, Abrasives, Surface finishing, Chemical mechanical planarization

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