Prof. Kevin T. Turner
Assistant Professor at Univ of Pennsylvania
SPIE Involvement:
Author
Publications (20)

SPIE Journal Paper | 31 March 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Semiconducting wafers, Distortion, Optical lithography, Etching, Overlay metrology, Mechanics, Error analysis, Lithography, Shape analysis, Image registration

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Lithography, Optical lithography, Mechanics, Spatial frequencies, Etching, Scanners, Shape analysis, Neodymium, Semiconducting wafers, Rhodium

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Thin films, Metrology, Optical lithography, Mechanics, Etching, Scanners, Finite element methods, Shape analysis, Semiconducting wafers, Overlay metrology

SPIE Journal Paper | 22 May 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Semiconducting wafers, 3D modeling, Finite element methods, Chemical elements, Lithography, Extreme ultraviolet lithography, Interfaces, Mechanics, Shape analysis, Scanners

SPIE Journal Paper | 21 March 2012
JM3 Vol. 11 Issue 1
KEYWORDS: Semiconducting wafers, Distortion, Overlay metrology, Lithography, Optical lithography, Scanners, Thin films, Finite element methods, Thin film deposition, Error analysis

Showing 5 of 20 publications
Conference Committee Involvement (12)
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2019
25 February 2019 | San Jose, California, United States
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Showing 5 of 12 Conference Committees
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