Mr. Kevin Yu
at
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Microelectromechanical systems, Oxides, Molecular bridges, Silica, Silicon, Scanning electron microscopy, Bridges, Shape analysis, Plasma enhanced chemical vapor deposition, Beam shaping

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Microelectromechanical systems, Switching, Molecular bridges, Silica, Silicon, Finite difference methods, Bridges, Thermal modeling, Systems modeling, Instrument modeling

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Actuators, Titanium, Silica, Composites, Thermal effects, Micromirrors, Bridges, Plasma enhanced chemical vapor deposition, Optical switching, Radiation effects

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Switches, Silica, Chromium, Micromirrors, Bridges, Beam shaping, Optical switching

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Bistability, Molecular bridges, Silica, Thermal effects, Bridges, Shape analysis, Aluminum, Beam shaping, Microrelays

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top