Dr. Ki-Nam Joo
Assistant Professor at Chosun Univ
SPIE Involvement:
Publications (8)

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Thin films, Ellipsometry, Beam splitters, Polarization, Reflection, Calibration, Spectroscopy, Interferometry, Reflectometry, Profiling

Proceedings Article | 28 August 2016 Paper
Proc. SPIE. 9960, Interferometry XVIII
KEYWORDS: Refractive index, Mirrors, Beam splitters, Phase shifting, Light emitting diodes, Calibration, Spectroscopy, Interferometry, Distance measurement, Neodymium

Proceedings Article | 1 July 2015 Paper
Proc. SPIE. 9655, Fifth Asia-Pacific Optical Sensors Conference
KEYWORDS: Light sources, Coarse wavelength division multiplexing, Optical sensors, Sensors, Spectroscopy, Interferometry, Ocean optics, Precision measurement, Distance measurement, Motion measurement

Proceedings Article | 22 June 2015 Paper
Proc. SPIE. 9525, Optical Measurement Systems for Industrial Inspection IX
KEYWORDS: Target detection, Mirrors, Beam splitters, Light emitting diodes, Spectroscopy, Interferometry, Ocean optics, Distance measurement, Spectral resolution, Optical interferometry

Proceedings Article | 1 May 2014 Paper
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Wafer-level optics, Refractive index, Mirrors, Polishing, Metrology, Silicon, Interferometry, CCD cameras, Geometrical optics, Semiconducting wafers

Showing 5 of 8 publications
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