Kibok Lee
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Lithography, Data modeling, Image processing, Neural networks, Photomasks, Image classification, Computational lithography, Binary data, Process modeling

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