Dr. Kidon Kim
at Korea Institute of Machinery & Materials
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 9 September 2008
Proc. SPIE. 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V
KEYWORDS: Refractive index, Antireflective coatings, Optical lithography, Polymers, Nanoimprint lithography, Transmittance, Photonic crystals, Fluorine, Reflection, Nickel

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Organic light emitting diodes, Polymers, Glasses, Photonic crystals, Sol-gels, Zinc oxide, Optical lithography, Ultraviolet radiation, Plasma enhanced chemical vapor deposition, Finite-difference time-domain method

Proceedings Article | 15 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Quartz, Ultraviolet radiation, Nanoimprint lithography, Glasses, Lithography, Thin films, Transistors, Liquid crystals, Polymers, Etching

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Coating, Ultraviolet radiation, Etching, Polymers, Lithography, Fluorine, Polymethylmethacrylate, Quartz, Transmittance, Plasma etching

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