Kimberly A. Ruben
at Brewer Science Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Microelectromechanical systems, Potassium, Etching, Polymers, Silicon, Manufacturing, Resistance, Electronic circuits, Semiconducting wafers, Bulk micromachining

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Etching, Polymers, Silicon, Coating, Oxygen, Wet etching, Plasma etching, Electronic circuits, Semiconducting wafers

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