Mr. King Ho Tam
at Univ of California Los Angeles
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 5, 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Oxides, Polishing, Metals, Copper, Dielectrics, Resistance, Chromium, Capacitance, Cesium, Chemical mechanical planarization

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