Mr. Kisho Shibakiri Profile

Kisho Shibakiri

at Tokyo Institute of Technology

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Proceedings Article | 6 August 2014 Paper

Optical measurement method for particles on printed substrate by light-scattering

Kisho Shibakiri, Shuji Fujii, Naoki Kagi

Proceedings Volume 9232, 923211 (2014) https://doi.org/10.1117/12.2064381

KEYWORDS: Particles, Light scattering, Scattering, Refractive index, Optical testing, Glasses, Mie scattering, Contamination, Imaging systems, Digital cameras

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Printed substrates are manufactured in clean environment to avoid defective productions caused by particle contaminations. However, since area of substrate has become very large in recent years, and the control of surface cleanliness is getting more difficult. In the previous work, the particle detection method in a large surface area of the glass substrate was developed with a simple system using a single-lens reflex digital camera. And the possibility of refractive-index calculation by scattered light of particles from the multi-directions measurement was shown. In this work, in order to utilize the luminance data and the coordinates of the particles obtained by the multi-directional measurement, the particle coordinate transformation and matching methods were studied. This study suggested the particle coordination matching method using OPM algorithm was applicable for detection of particle on the printed substrate. Using this method, particles on substrate surface could be identified using by particle coordinates and luminance acquired by the multi-direction.

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