Prof. Kiyoshi Takamasu
Professor at Univ of Tokyo
SPIE Involvement:
Author
Area of Expertise:
Precision Measurement , Nanometer Mesurement , Uncertainty Estimation , Standards , CD-SEM , TEM
Publications (27)

Proceedings Article | 21 June 2019
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Refractive index, Mirrors, Beam splitters, Interferometers, Error analysis, Computer programming, Distance measurement, Spherical lenses

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Edge detection, Metrology, Optical lithography, Image processing, Scanning electron microscopy, Transmission electron microscopy, Ion beams, Line width roughness, Semiconducting wafers

SPIE Journal Paper | 8 September 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Line width roughness, Extreme ultraviolet, Fin field effect transistors, Edge detection, Semiconductors, Metrology, Ion beams, Electron microscopes, Line edge roughness, Transmission electron microscopy

Proceedings Article | 22 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Edge detection, Metrology, Fin field effect transistors, Denoising, Transmission electron microscopy, Extreme ultraviolet, Line width roughness, Line edge roughness

SPIE Journal Paper | 19 June 2017
OE Vol. 56 Issue 06
KEYWORDS: Laser optics, Laser development, Spherical lenses, Laser metrology, 3D metrology, Metrology, Optical testing, Sensors, Phase shifts

Showing 5 of 27 publications
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