Dr. Kiyotaka Imai
at Tokyo Electron Technology Solutions Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 9, 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Optical lithography, Etching, Silicon, Inspection, Atomic layer deposition, Photomasks, Line width roughness, Plasma etching, Line edge roughness, Semiconducting wafers

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