Dr. Kiyotaka Imai
at DNP Fine Electronics Sagamihara Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 19, 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Logic, Metals, Dielectrics, Ions, Resistance, Transistors, Field effect transistors, CMOS technology, Nanowires

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