Dr. Klará Maturová
Research at TNO
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11324, 113240J (2020) https://doi.org/10.1117/12.2551853
KEYWORDS: Quantum computing, Quantum dots, Silicon, Prototyping

Proceedings Article | 19 March 2018 Presentation + Paper
Violeta Navarro, Abbas Mohtashami, Rodolf Herfst, Klara Maturova, Maarten van Es, Daniele Piras, Hamed Sadeghian
Proceedings Volume 10584, 1058404 (2018) https://doi.org/10.1117/12.2294994
KEYWORDS: Optical lithography, Optical alignment, Nanostructures, Atomic force microscopy, Overlay metrology, Metrology, Scanning probe microscopy, Manufacturing, Electrodes, Extreme ultraviolet lithography

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