Dr. Klará Maturova
Research at TNO
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Nanostructures, Metrology, Optical lithography, Electrodes, Manufacturing, Atomic force microscopy, Extreme ultraviolet lithography, Optical alignment, Scanning probe microscopy, Overlay metrology

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