Dr. Klaus Edinger
Head Field of Business Repair at Carl Zeiss SMT GmbH
SPIE Involvement:
Publications (18)

Proceedings Article | 15 September 2022 Presentation
Proceedings Volume PC12325, PC123250E (2022) https://doi.org/10.1117/12.2656143

Proceedings Article | 23 October 2015 Paper
K. Edinger, K. Wolff, P. Spies, T. Luchs, H. Schneider, N. Auth, Ch. Hermanns, M. Waiblinger
Proceedings Volume 9635, 96351P (2015) https://doi.org/10.1117/12.2207755
KEYWORDS: Photomasks, Electrons, Etching, Quartz, Ions, Chemistry, Electron beams, Molecules, Extreme ultraviolet, Particles

Proceedings Article | 17 October 2014 Paper
K. Edinger, K. Wolff, H. Steigerwald, N. Auth, P. Spies, J. Oster, H. Schneider, M. Budach, T. Hofmann, M. Waiblinger
Proceedings Volume 9235, 92350R (2014) https://doi.org/10.1117/12.2072474
KEYWORDS: Photomasks, Ion beams, Ions, Chemistry, Electron beams, Quartz, Etching, Molecules, Image resolution, Extreme ultraviolet

Proceedings Article | 23 September 2009 Paper
Proceedings Volume 7488, 74880H (2009) https://doi.org/10.1117/12.833404
KEYWORDS: Etching, Magnesium, Opacity, Optical properties, Bridges, Yield improvement, Cadmium, Scanning electron microscopy, Electron beams, Climatology

Proceedings Article | 23 September 2009 Paper
Marcus Pritschow, Harald Dobberstein, Klaus Edinger, Mathias Irmscher, Douglas Resnick, Kosta Selinidis, Ecron Thompson, Markus Waiblinger
Proceedings Volume 7488, 74880V (2009) https://doi.org/10.1117/12.833030
KEYWORDS: Scanning electron microscopy, Etching, Electron beams, Semiconducting wafers, Metals, Manufacturing, Silicon, Nanoimprint lithography, Photomasks, Ultraviolet radiation

Showing 5 of 18 publications
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