Dr. Klaus Prume
at aixACCT Systems GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 April 2007
Proc. SPIE. 6526, Behavior and Mechanics of Multifunctional and Composite Materials 2007
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Ferroelectric materials, Electrodes, Dielectrics, Silicon, Sol-gels, Thin film devices, Piezoelectric effects

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