Viktor S. Klimin
at Southern Federal Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Lithography, Nanostructures, Etching, Gallium arsenide, Surface roughness, Atomic force microscopy, Photoresist materials, Wet etching, Plasma etching, Plasma

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