Dr. Kohei M. Itoh
at Keio Univ
SPIE Involvement:
Conference Program Committee | Author
Publications (1)

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Etching, Silicon, Magnetism, Photomasks, Microfabrication, Reactive ion etching, Computer architecture, Quantum communications, Plasma, Quantum computing

Conference Committee Involvement (1)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
13 December 2004 | Sydney, Australia
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